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Zygo of U300_240
Submitted by
writer
on Mon, 2014-03-31 11:30
Jan 2014
Beamline:
Diamond Radiator
Location:
U Conn
Activity:
R&D
Zygo (white light interferometer) of UConn's newest raster profile. The diamond is swept across a 50Hz pulse of the excimer laser, leaving lower surface variation.